Laserwort Limited - Products - STS - Optoelectronics (English)


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	Surface Technology Systems PLC. (STS)
	Optoelectronics Technologies

		By removing the requirement for optical to electrical conversion for signal processing, the latest generation of optical devices are set to revolutionize the fiber optic based technologies currently used for high transmission speed networks. Silicon based MEMS Optical Switches & Attenuators are one of the first generation of products to enter this market place and within a short space of time, these will be complemented by a range of other products, notably by those based on planar optical waveguide technology. Research into optical waveguides started in the early-90s in Denmark, with development carried out exclusively using STS' PECVD and ICP etch systems. As more companies have begun to develop products based on waveguide technology, STS' equipment has been readily accepted as the standard for this application and sales have increased significantly. A close partnership with its customers has been the key to STS' success within this market and has allowed the company to introduce a range of complimentary technologies that fully meet the requirements of the optoelectronics industry. To compliment its existing range of PECVD waveguide deposition processes, at the end of 1999, following an extensive development program with its waveguide customers, STS introduced its Advanced Oxide Etch or AOE source. The AOE source has been specifically developed to overcome the problems associated with oxide etch in high density plasma sources and has been readily accepted by the industry for the etching of waveguide core structures. STS' ICP sources have also been used for the fabrication of microlens arrays by resist transfer processing. STS ICP systems have demonstrated the high degree of selectivity control and cross-wafer uniformity that are required for the successful fabrication of these devices and repeatedly produce lenses with perfect optical performance.
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