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Home / SPTS Technologies / HF Release Etch / uEtch

uEtch

The uEtch is a single-wafer system specifically designed for university and small research laboratories.

Key Benefits

Fully integrated, compact system includes built-in HF gas cabinet
PLC controlled with multi-user features and extensive safety interlocks
Can process single whole wafers (100-200mm) or die on a carrier
HF vapour processes are transferable to SPTS 3- and 25-wafer production systems, offering a path from concept to production

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