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Products

 

                                                                                                                                                           

Specializes in the following foreign brands:

 

Thin Film Deposition:


ALD/ MVD

PECVD

PVD

TEOS/ POCl3/ TMPI/ TMB

Oxidation

Diffusion


LPCVD

APCVD

   

 

   

Photolithography:

 

Coat (spray/ spin) & Developer System

Lift-Off/ Anneal

Cleaner & Others

Wafer Inspection & Sorting Systems

 

 

Maskless Photolithography

 


 

Mask Aligner

Solar Cell Tester


                                       

 

 

 

 

 

 

 

 

Etching:

 

Single Side Wafer Processing

 Wafer Thinning

Stress Relief

 

Wet Processing Station

 IPA dryer

CMP

 Grinding

Plasma etch

 Deep Si etch

 

 

 

 

 

 

 

Plasma etch

Dielectric

Plasma etch

Compound

Plasma etch

Metal 

         

 

 


 

 

 


 

 

 

Cleaning:

Wet Processing Station

Mega-sonic system

Ultra-sonic system

Ozone Wet Strip

IPA Dryer

 

       

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Wafer Bonding:

Wafer Bonder

                                                                                                                                

 

 

 

 

 

 

 

 

 

Sacrifical Release:

Si Etch Release (XeF2)

SiO2 Etch Release (VHF)

                                                                                      

 

 

 

 

 

 

 

 

 

Dicing:

 

Saw Dicing

Plasma Dicing

                                                             

 

 

 

 

 

 

 

 

 

Miscellaneous:

Bonded Wafer Inspection

 


Lift-Off/ Anneal

Cleaner & Others

Wafer Inspection & Sorting Systems

Gas panels

Gas Cabinets

Components

Wafer Transfer

 


RF Generator

Amplifer

TEOS/ POCl3/ TMPI/ TMB

 

 

 

 

 

 

 
 
  
 

   
    
 
 
       
     

 

 

   

Plasma etch system - ICP

   

Plasma etch system - ICP