OAI
OAI is a leading manufacturer of reliable, precision equipment for MEMS, semiconductors, nanotechnology, cleanroom automation, and for UV light measurement. With products installed worldwide, OAI systems are used for both R&D and production of semiconductors, MEMS and microfluidic devices. From mask aligners and UV light sources to UV power meters, OAI is a leader in the industry for over 35 years.
The OAI mask alignment and exposure system is superior to higher priced systems. We provide a wide range of system options. The systems are available as a manual or fully automated mask aligner, and are capable of performing sub-micron, level-to-level alignment and double sided (IR) lithography. It's flexible design allows printing on various substrates - round or square - up to 300mm. The exposure system is compatible with photoresist in Near, Mid or Deep UV range.
With OAI fully automatic mask aligner, production is a simple matter of calling up a menu, loading the wafer, and pressing start.
www.oainet.com
