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uEtch
uEtch
The uEtch is a single-wafer system specifically designed for university and small research laboratories.
Key Benefits
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Fully integrated, compact system includes built-in HF gas cabinet
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PLC controlled with multi-user features and extensive safety interlocks
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Can process single whole wafers (100-200mm) or die on a carrier
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HF vapour processes are transferable to SPTS 3- and 25-wafer production systems, offering a path from concept to production
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