The MVD300 (and MVD300E with an EFEM) are designed for high performance, flexibility and reliability for the most demanding high volume manufacturing applications.

Features and Benefits

• Batch processing for high throughput and small footprint
  • 200mm wafers (Pod loader or EFEM available)
  • 300mm wafers (EFEM enabled)
  • Singulated die on tape frames
  • Components on trays
  • Custom substrate fixturing available
• Superior Cost of Ownership – low consumption and efficient utilization of precursors
• Up to 4 Precursors
• Integrated plasma surface treatment and chamber clean capability
• Automated process sequence routines
• Extensive self-diagnostic and data logging capability
• Exceptional reliability
• MVD and ALD-capable

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