
Modutek Corporation
Modutek Corporation is to provide turnkey support in the High Tech, Bio-Med, Pharmaceutical, MEMS and Disk Drive industries. Complete process stations, process components, wastewater treatment, custom plastic and stainless steel fabrication, machining/CNC, field service, used equipment refurbishing and software upgrades.
Wet Process Components & Process Station
Over the last 20 years, Modutek has established itself as a leader in providing wet process components to the semiconductor, hard disk and flat panel industries. Here is a look at our products.
- Process Stations
- DR - Dump Rinse
- F Series - Constant Temperature Filter Etch
- Megasonics
- MSI Series - Indirect Megasonic System
- MSD Series - Direct Megasonic System
- MSG Series - Megasonic Generators Qa Series - Quartz Constant Temperature Bath
- QFa Series - High Temp. Recirculating Bath
- Nb Series - Silicon Nitride Etch Bath
- RCe Series - Temperature Control Recirculation
- Chemfeed Series - Chemical Injections System
- Controllers
- Neutralizers
- Sysmax

