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PELCHEM
PELCHEM is focused on manufacturing and marketing a wide variety of high quality, advanced fluorochemicals and value added downstream products for the global fluorochemical industry.
High purity xenon difluoride (XeF2) is used in the MEMS segment of the semiconductor industry as a selective silicon etch gas. XeF2 etches silicon isotropically at high speed without the use of a plasma. The process is dry with only Xe and SiF4 being released as gaseous products. The XeF2 is free of any XeF4 contamination. It is using in our represented Xactix XeF2 etching system.
