Annealsys

Annealsys are specialized in Rapid Thermal Processing (RTP), Rapid Thermal Chemical Vapour Deposition (RTCVD), Low Pressure Chemical Vapour Deposition (LPCVD) and Metal Organic Chemical Vapour Deposition (MOCVD).

Their products can be applicable to R&D, quality control & production application in the field of silicon and compound semiconductors, MEMS, solar cells etc.

AS-One – Low cost Rapid Thermal Processing systems for Silicon, Compound Semiconductors, Photonics and MEMS processes.

SprayCVD-050 – Two-inch tubular furnace for SprayCVD and annealing processes RTCVD.

MC050 – Two-inch tubular furnace for SprayCVD and annealing processes MOCVD.

www.annealsys.com



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AS-One

MC050 MOCVD

SprayCVD-050