Advanced Vacuum
Advanced Vacuum is a company specializing in integration of software and hardware and sole software solutions for the vacuum and thin film industry. Advanced Vacuum has unprecedented experience in the plasma equipment field as a software supplier.The Vision series is the next generation of tools succeeding the successful 300-series manufactured by STS for more than 20 years, and is designed for research, pilot or low volume production. The open loadlock design provide flexibility on various semiconductor applications.
The Vision 310 Mk II PECVD (Plasma Enhanced Chemical Vapor Deposition) applications including silicon oxide, silicon nitride, silicon oxynitride and silicon carbide depositions. The Vision 320 Mk II RIE (Reactive Ion Etch) is fully characterized for a wide range of etching processes including silicon, dielectric, metal and compound semiconductor materials.
