Xactix, Inc.

XACTIX is the manufacturer of the Xetch® xenon difluoride etching systems. This dry isotropic etching tool is very useful in MEMS applications due to high selectivity to silicon versus many standard films including photoresist, silicon dioxide, silicon nitride, and aluminum.

The Xetch® systems are particularly well suited for release, but is certainly not limited to MEMS applications To meet the wide variety of requirements, Xactix in cooperation with its partner SPP/STS, offers a variety of etchers to provide the advanced processes and flexibility required for the high volume MEMS release. These etchers incorporate over 15 years of combined experience in manufacturing MEMS using XeF2 silicon etching.

www.xactix.com