P9000 Automatic/Manual Frame Processing System

The P9000 Frame Processing System is a software-controlled, pre-saw wafer coating and post-saw wafer cleaning system. The system features a high-performance spindle motor and high-precision stepper motor and can be operated in either auto or manual mode for thin wafers of different frame sizes.

C&D has developed specialized modules for handling wafers on tape frames and expansion hoop rings, for processing substrates pre and post dice processing. C&D has developed special wafer handling solutions to transfer and spin wafers on tape frame and hoop rings simultaneously in the same tool. Specialized Wafer Clean & Coat Modules are designed as dual purpose, and can serve as a frame coater and a hoop ring cleaner, and can be outfitted with several kinds of chemical-mechanical agitation for wafer cleaning, including nitrogen aspirated spray.

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