Primaxx Inc.

One of the Group's principal activity is to manufacture micro technology equipment. As a leading supplier of silicon deep-etch systems and silicon oxide sacrificial layer etching systems indispensable for MEMS manufacturing, SPP offers a wide range of solutions to support the increasing demands of volume manufacturers. By building on established technologies, SPP develops solutions for a broad range of companies who are beginning to implement advanced processing technologies in areas such as power MOSFET and advanced packaging techniques on 200mm and 300mm wafers (3D packaging and Chip Scale Packages).

Advanced Silicon Etch (ASE)

Oxide & Compound Semiconductor Etch

Plasma Enhanced Chemical Vapor Deposition (PECVD)

Sacrificial Layer Etch (SLE)

Platform

www.spp-pts.com