Vertical Furnace

Oxidation / Diffusion / LPCVD

SPT offers a range of large batch vertical furnaces. We are able to offer both new and factory-certified re-manufactured systems as well as custom system conversions to meet specific engineering requirements. The production-proven vertical furnaces deliver superior process results, high productivity and the lowest cost of ownership (CoO).

• AVP/RVP for 100 to 200 mm wafers

• RVP-300 for 200/300 mm wafers

Our diverse process portfolio includes:

• Wet/dry thermal oxide

• Radical oxidation

• Stoichiometric and stress controlled SiN

• TEOS, SiH4 and DCS-based SiO2

• Doped and un-doped polysilicon

• 100 to >1200°C anneals

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