Products

 

Thin Film Deposition:

ALD/ MVD

PECVD

PVD

TEOS/ POCl3/ TMPI/ TMB

 

Photolithography:

 

Coat (spray/ spin) & Developer System

Lift-Off/ Anneal

Cleaner & Others

Wafer Inspection & Sorting Systems

Maskless Photolithography

Mask Aligner

Solar Cell Tester

                                       

 

 

 

 

 

 

 

 

 

 

 

Etching:

Single Side Wafer Processing/

Wafer Thinning/

Stress Relief

Wet Processing Station

IPA dryer

Plasma etch system - Metal Etch

Plasma etch system - Deep Si etch

 

Plasma etch system - Dielectric

Plasma etch system - Compound

                                                                                                         

 

Cleaning:

 

Wet Processing Station

Mega-sonic system

Ultra-sonic system

Ozone Wet Strip

IPA Dryer

 

 

 

 

 

 

 

 

 

 

 

 

Wafer Bonding:

Wafer Bonder

                                                                                                           

 

 

 

 

 

 

 

 

 

 

 

Sacrifical Release:

Si Etch Release (XeF2)

SiO2 Etch Release (VHF)

                                                             

 

 

 

 

 

 

 

 

 

 

 

Dicing:

Saw Dicing

Plasma Dicing

                                                             

 

 

 

 

 

 

 

 

Miscellaneous:

Bonded Wafer Inspection

Lift-Off/ Anneal

Cleaner & Others

Wafer Inspection & Sorting Systems

Gas panels/ Cabinets/ Components

Wafer Transfer

RF Generator/ amplifer

TEOS/ POCl3/ TMPI/ TMB

   

 

 

 

 
 
  

 

 

   
   
 
 
       
       

 

 

   

Plasma etch system - ICP

   

Plasma etch system - ICP

 

   

Plasma etch system - ICP

 

   

Plasma etch system - ICP